硅MEMS陀螺模态匹配技术研究综述
夏陈浩, 郑旭东, 王雪同, 沈耀杰, 佟文元, 刘国文
Review of Research on Modal Matching Technology for Silicon MEMS Gyroscopes
XIA Chenhao, ZHENG Xudong, WANG Xuetong, SHEN Yaojie, TONG Wenyuan, LIU Guowen
导航与控制
.
2024, (2): 19
-29
.
DOI: 10.3969/j.issn.1674-5558.2024.02.002
