微系统集成技术发展与展望

微系统集成技术发展与展望

单光宝, 朱嘉婧, 郑彦文, 邢朝洋

Recent Development and Perspectives of Microsystem Integration Technology

SHAN Guang-bao, ZHU Jia-jing, ZHENG Yan-wen, XING Chao-yang

导航与控制 . 2022, (3-4): 20 -28 . DOI: 10.3969/j.issn.1674-5558.2022.h3.003