梳状电容式微加速度计温度性能优化
王帅民, 孙国良, 牛昊斌, 李博洋, 余才佳
Temperature Performance Optimization of Comb-finger Capacitive Micro Accelerometer
WANG Shuai-min, SUN Guo-liang, NIU Hao-bin, LI Bo-yang, YU Cai-jia
导航与控制
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2019, (4): 89
-94
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DOI: 10.3969/j.issn.1674-5558.2019.04.014
